Aberration Corrected Electron Microscopy: Prospects and Applications
نویسنده
چکیده
Aberration correction in the TEM is now relatively well established with more than 20 corrected instruments installed worldwide. This paper will review these instrumental advances and will also describe the underlying theory and computation required to optimise data acquisition and interpret aberration corrected images. Finally the combination of direct electron optical correction and indirect aberration compensation in exit wave reconstruction will be described.
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